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1. Identity statement
Reference TypeJournal Article
Sitemtc-m16.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier6qtX3pFwXQZ3r59YDa/JT4jx
Repositorysid.inpe.br/iris@1916/2006/01.25.13.22
Last Update2006:01.25.13.22.00 (UTC) administrator
Metadata Repositorysid.inpe.br/iris@1916/2006/01.25.13.22.19
Metadata Last Update2018:06.05.01.20.24 (UTC) administrator
Secondary KeyINPE--PRE/
ISSN0101-7659
Citation KeyAmorimAlEiTrCoMo:2004:DiGrCV
TitleThe diamond growth CVD assisted by hot filament in silicon substrate in 80 cm2 areas
Year2004
Access Date2024, May 19
Secondary TypePRE PN
Number of Files1
Size452 KiB
2. Context
Author1 Amorim, A.
2 Alves, A. R.
3 Eichenberger Neto, J.
4 Trava-Airoldi, Vlademir Jesus
5 Corat, Evaldo José
6 Moro, João Roberto
Resume Identifier1
2
3
4
5 8JMKD3MGP5W/3C9JH33
Group1 LAS-INPE-MCT-BR
Affiliation1 PPGSS Engenharia e Ciência dos Materiais. Universidade São Francisco Itatiba
2 Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Sensores e Materiais, (INPE, LAS)
JournalRevista Brasileira de Aplicações de Vácuo
Volume23
Number2
Pages88-92
History (UTC)2006-01-25 13:26:51 :: marciana -> administrator ::
2010-05-11 20:50:57 :: administrator -> marciana ::
2011-12-12 11:51:26 :: marciana -> administrator :: 2004
2018-06-05 01:20:24 :: administrator -> marciana :: 2004
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
Version Typepublisher
KeywordsCVD Diamond
Big Areas
Hot Filament
AbstractNowadays, the diamond grown by chemical vapor deposi-tion (CVD) is seen economically as one of the most interest-ing materials, due to its vast application, mainly in short-term, resulting from diamonds unique properties. Its appli-cations reach many technological areas, standing out the mechanics area due to possibilities use as cutting tools, tribological layers in automobiles and aeronautical engines, heat sinks, surfaces protection for aggressive environments and abrasive special devices which also add applications in biological areas. The largest obstacle for these applications is the high cost of diamond films production if compared commercially with other alternative materials. So, the area and the growth rate increasing is a solution for the costs reduction in the diamond production. The CVD diamond samples used in this work had been grown in a big reactor, for growth in big areas, by the hot filament chemical vapor deposition technique (HFCVD). The precursory mixture of 2% of methane in hydrogen was maintained by a of 50 mbar pressure for a E2M8 - Boc Edwards vacuum pump. The substrate used in the growths was silicon (100) with 100mm of diameter. The growth temperature was maintained in (800 ± 20) °C and the growth time was changeable until about 50 h, when it had the breaks of the substrate. The diamond growth rate measured (0,7 ± 0,1) µm/h is low for economic viability of the process. The spectroscopy of Ra-man scattering analysis evidences the diamond growth of good quality, approximately in one area of 80 cm2, with minimum compressive stress. The properties and the dia-mond growth rates the surfaces of the used substrate had been uniform. The reached development allows diamond growth 30µm thickness in 80 cm2 areas, without breaking of the substrate.
AreaFISMAT
Arrangementurlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > The diamond growth...
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4. Conditions of access and use
data URLhttp://urlib.net/ibi/6qtX3pFwXQZ3r59YDa/JT4jx
zipped data URLhttp://urlib.net/zip/6qtX3pFwXQZ3r59YDa/JT4jx
Languageen
Target Fileamorim.pdf
User Groupadministrator
marciana
Visibilityshown
Archiving Policyallowpublisher allowfinaldraft
Read Permissionallow from all
Update Permissionnot transferred
5. Allied materials
Next Higher Units8JMKD3MGPCW/3ESR3H2
DisseminationPORTALCAPES
Host Collectionsid.inpe.br/banon/2003/08.15.17.40
6. Notes
Empty Fieldsalternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository month nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url
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