1. Identity statement | |
Reference Type | Journal Article |
Site | mtc-m16.sid.inpe.br |
Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
Identifier | 6qtX3pFwXQZ3r59YDa/JT4jx |
Repository | sid.inpe.br/iris@1916/2006/01.25.13.22 |
Last Update | 2006:01.25.13.22.00 (UTC) administrator |
Metadata Repository | sid.inpe.br/iris@1916/2006/01.25.13.22.19 |
Metadata Last Update | 2018:06.05.01.20.24 (UTC) administrator |
Secondary Key | INPE--PRE/ |
ISSN | 0101-7659 |
Citation Key | AmorimAlEiTrCoMo:2004:DiGrCV |
Title | The diamond growth CVD assisted by hot filament in silicon substrate in 80 cm2 areas |
Year | 2004 |
Access Date | 2024, May 19 |
Secondary Type | PRE PN |
Number of Files | 1 |
Size | 452 KiB |
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2. Context | |
Author | 1 Amorim, A. 2 Alves, A. R. 3 Eichenberger Neto, J. 4 Trava-Airoldi, Vlademir Jesus 5 Corat, Evaldo José 6 Moro, João Roberto |
Resume Identifier | 1 2 3 4 5 8JMKD3MGP5W/3C9JH33 |
Group | 1 LAS-INPE-MCT-BR |
Affiliation | 1 PPGSS Engenharia e Ciência dos Materiais. Universidade São Francisco Itatiba 2 Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Sensores e Materiais, (INPE, LAS) |
Journal | Revista Brasileira de Aplicações de Vácuo |
Volume | 23 |
Number | 2 |
Pages | 88-92 |
History (UTC) | 2006-01-25 13:26:51 :: marciana -> administrator :: 2010-05-11 20:50:57 :: administrator -> marciana :: 2011-12-12 11:51:26 :: marciana -> administrator :: 2004 2018-06-05 01:20:24 :: administrator -> marciana :: 2004 |
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3. Content and structure | |
Is the master or a copy? | is the master |
Content Stage | completed |
Transferable | 1 |
Content Type | External Contribution |
Version Type | publisher |
Keywords | CVD Diamond Big Areas Hot Filament |
Abstract | Nowadays, the diamond grown by chemical vapor deposi-tion (CVD) is seen economically as one of the most interest-ing materials, due to its vast application, mainly in short-term, resulting from diamonds unique properties. Its appli-cations reach many technological areas, standing out the mechanics area due to possibilities use as cutting tools, tribological layers in automobiles and aeronautical engines, heat sinks, surfaces protection for aggressive environments and abrasive special devices which also add applications in biological areas. The largest obstacle for these applications is the high cost of diamond films production if compared commercially with other alternative materials. So, the area and the growth rate increasing is a solution for the costs reduction in the diamond production. The CVD diamond samples used in this work had been grown in a big reactor, for growth in big areas, by the hot filament chemical vapor deposition technique (HFCVD). The precursory mixture of 2% of methane in hydrogen was maintained by a of 50 mbar pressure for a E2M8 - Boc Edwards vacuum pump. The substrate used in the growths was silicon (100) with 100mm of diameter. The growth temperature was maintained in (800 ± 20) °C and the growth time was changeable until about 50 h, when it had the breaks of the substrate. The diamond growth rate measured (0,7 ± 0,1) µm/h is low for economic viability of the process. The spectroscopy of Ra-man scattering analysis evidences the diamond growth of good quality, approximately in one area of 80 cm2, with minimum compressive stress. The properties and the dia-mond growth rates the surfaces of the used substrate had been uniform. The reached development allows diamond growth 30µm thickness in 80 cm2 areas, without breaking of the substrate. |
Area | FISMAT |
Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > The diamond growth... |
doc Directory Content | access |
source Directory Content | there are no files |
agreement Directory Content | there are no files |
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4. Conditions of access and use | |
data URL | http://urlib.net/ibi/6qtX3pFwXQZ3r59YDa/JT4jx |
zipped data URL | http://urlib.net/zip/6qtX3pFwXQZ3r59YDa/JT4jx |
Language | en |
Target File | amorim.pdf |
User Group | administrator marciana |
Visibility | shown |
Archiving Policy | allowpublisher allowfinaldraft |
Read Permission | allow from all |
Update Permission | not transferred |
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5. Allied materials | |
Next Higher Units | 8JMKD3MGPCW/3ESR3H2 |
Dissemination | PORTALCAPES |
Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
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6. Notes | |
Empty Fields | alternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository month nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url |
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7. Description control | |
e-Mail (login) | marciana |
update | |
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